A lithography system is a projection system. Light is projected through a blueprint of the pattern that will be printed. Microchips are made by building up complex patterns of transistors, layer by layer, on a photosensitive silicon wafer. Lithography technology is fundamental to mass produce microchips or integrated circuits.
Our 10kW converter is used to supply components for lithography systems. The requirements on the converter are very demanding due to extreme load variations (pulse load). A highly dynamic power supply is required.
